Pressure regulator for
Semiconductor manufacturing process

  • Material
  • Flow rate
  • Inlet Pressure
  • Outlet Pressure
  • Proof pressure
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High Purity High Performance High Pressure Regulator

L20 Series RoHS Directive Products

High Pressure Regulator

  • SUS316L,SUS+Hastelloy®
  • 60 NL/min
  • 14.8 MPa
  • 0.99 MPa
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High Purity High Performance Point-of-Use Pressure Regulator

L25 Series RoHS Directive Products

Point-of-Use Pressure Regulator

  • SUS316L,SUS+Hastelloy®
  • 20 NL/min
  • 6 MPa
  • 0.99 MPa
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High Purity High Performance High Pressure Regulator

L21 Series RoHS Directive Products

High Pressure Regulator

  • SUS316L,SUS+Hastelloy®
  • 20 NL/min
  • 14.8 MPa
  • 0.99 MPa
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High Purity High Performance Point-of-Use Pressure Regulator

L26 Series RoHS Directive Products

Point-of-Use Pressure Regulator

  • SUS316L,SUS+Hastelloy®
  • 20 NL/min
  • 0.99 MPa 2 MPa 6 MPa
  • 0.99 MPa
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High Purity High Performance Point-of-Use Pressure Regulator

L35 Series RoHS Directive Products

Medium Flow Rate Applications

  • SUS316L,SUS+Hastelloy®
  • 100 NL/min
  • 6 MPa
  • 0.9 MPa
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High Purity High Performance High Pressure Regulator

L61 Series RoHS Directive Products

High Flow Rate Applications

  • SUS316L,SUS+Hastelloy®
  • 300 NL/min
  • 14.8 MPa
  • 0.8 MPa
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High Purity High Performance High Pressure Regulator

L62 Series RoHS Directive Products

High Flow Rate Applications (Needle Type)

  • SUS316L,SUS+Hastelloy®
  • 300 NL/min
  • 14.8 MPa
  • 0.8 MPa
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High Purity High Performance High Pressure Regulator

L81 Series RoHS Directive Products

High Pressure Regulator

  • SUS316L,SUS+Hastelloy®
  • 25 NL/min
  • 14.8 MPa
  • 0.6 MPa
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High Purity High Performance High Pressure Regulator

L88 Series RoHS Directive Products

High Pressure Regulator
(Recommended for B2H6 , NF3 Service)

  • SUS316L
  • 25 NL/min
  • 14.8 MPa
  • 0.99 MPa
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High Purity High Performance Absolute Pressure Regulator

L96 Series

Absolute Pressure Regulator

  • SUS316L,SUS+Hastelloy®
  • 5 NL/min
  • 0.99 MPa
  • -0.1〜0〜0.2 MPa
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High Purity High Performance Point-of-Use Pressure Regulator

LH1 Series RoHS Directive Products

High Flow Rate Applications

  • SUS316L,SUS+Hastelloy®
  • 500 NL/min
  • 6 MPa
  • 0.8 MPa
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High Purity High Performance Point-of-Use Pressure Regulator

LH2 Series RoHS Directive Products

High Flow Rate Applications (Needle Type)

  • SUS316L,SUS+Hastelloy®
  • 500 NL/min
  • 6 MPa
  • 0.8 MPa
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High Purity High Performance Point-of-Use Pressure Regulator

LM1 Series RoHS Directive Products

High Flow Rate Applications

  • SUS316L
  • 700 NL/min
  • 2 MPa
  • 0.8 MPa
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High Purity High Performance Point-of-Use Pressure Regulator

LM2 Series RoHS Directive Products

High Flow Rate Applications (Needle Type)

  • SUS316L
  • 700 NL/min
  • 2 MPa
  • 0.8 MPa
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High Performance Point-of-Use Auto Pressure Regulator

LM2-D Series RoHS Directive Products

Point-of-Use Auto Pressure Regulator

  • SUS316L
  • 700 NL/min
  • 2 MPa
  • 0.8 MPa
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High Purity High Performance Point-of-Use Pressure Regulator

LL1 Series

High Flow Rate Applications

  • SUS316L
  • 1000 NL/min
  • 2 MPa
  • 0.8 MPa
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High Purity High Performance Point-of-Use Pressure Regulator

LL2 Series RoHS Directive Products

High Flow Rate Applications

  • SUS316L
  • 1500 NL/min
  • 2 MPa
  • 0.8 MPa
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High Purity High Performance Point-of-Use Pressure Regulator

L18 Series RoHS Directive Products

Miniature Pressure Regulator Standard Flow Rate Applications

  • SUS316L,SUS+Hastelloy®
  • 20 NL/min
  • 0.99 MPa
  • 0.6 MPa
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High Purity High Performance Point-of-Use Pressure Regulator

L18H Series RoHS Directive Products

Miniature Pressure Regulator Medium Flow Rate Applications

  • SUS316L,SUS+Hastelloy®
  • 30 NL/min
  • 0.99 MPa
  • 0.7 MPa
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High Performance High Pressure Regulator

R20 Series

High Pressure Regulator

  • SUS316L,SUS+Hastelloy®
  • 60 NL/min
  • 14.8 MPa
  • 1.2 MPa
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High Performance Point-of-Use Pressure Regulator

R25 Series

Point-of-Use Pressure Regulator

  • SUS316L,SUS+Hastelloy®
  • 20 NL/min
  • 6 MPa
  • 1.2 MPa
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High Performance Point-of-Use Pressure Regulator

R26 Series

Point-of-Use Pressure Regulator

  • SUS316L,SUS+Hastelloy®
  • 20 NL/min
  • 2MPa
  • 0.99 MPa
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High Performance Point-of-Use Pressure Regulator

R35 Series RoHS Directive Products

Medium Flow Applications

  • SUS316L,SUS+Hastelloy®
  • 100 NL/min
  • 6 MPa
  • 0.99 MPa
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High Performance Point-of-Use Pressure Regulator

R36 Series

Medium Flow Rate Applications

  • SUS316L,SUS316
  • 100 NL/min
  • 2 MPa
  • 0.99 MPa
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High Performance High Pressure Regulator

R61 Series

High Flow Rate Applications

  • SUS316L
  • 300 NL/min
  • 14.8 MPa
  • 0.99 MPa
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High Performance High Pressure Regulator

R72 Series

High Delivery Pressure Regulator

  • SUS316L
  • 25 NL/min
  • 21MPa
  • 15 MPa
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High Performance Two-Stage Pressure Regulator

R81 Series RoHS Directive Products

Minimizes Supply Pressure Effect

  • SUS316L,SUS+Hastelloy®
  • 25 NL/min
  • 14.8 MPa
  • 0.6 MPa
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High Performance Point-of-Use Pressure Regulator

RH1 Series

High Flow Rate Applications

  • SUS316L,SUS+Hastelloy®
  • 500 NL/min
  • 6 MPa
  • 0.99 MPa
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High Performance Point-of-Use Pressure Regulator

RH2 Series

High Flow Rate Applications

  • SUS316L,SUS316
  • 500 NL/min
  • 2 MPa
  • 0.99 MPa
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High Performance Point-of-Use Pressure Regulator

RH2-D Series

High Flow Rate Applications

  • SUS316L,SUS316
  • 500 NL/min
  • 2 MPa以下
  • 0.99 MPa
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High Performance Point-of-Use Dome Loaded Pressure Regulator

RLD Series

Dome Loaded Pressure Regulator Designed for Remote Operation in High Flow Rate Applications

  • SUS316
  • 6000 NL/min
  • 2 MPa
  • 0.8 MPa