Pressure regulator for
Semiconductor manufacturing process

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Pressure regulator for Semiconductor manufacturing process

MMaterial
FFlow rate
P1Inlet Pressure
P2Outlet Pressure
PProof pressure

RoHS Directive Products
- MSUS316L,SUS+Hastelloy®
- F60 NL/min
- P114.8 MPa
- P20.99 MPa
High Purity High Performance High Pressure Regulator

L20 Series

High Pressure Regulator
RoHS Directive Products
- MSUS316L,SUS+Hastelloy®
- F20 NL/min
- P16 MPa
- P20.99 MPa
High Purity High Performance Point-of-Use Pressure Regulator

L25 Series

Point-of-Use Pressure Regulator
RoHS Directive Products
- MSUS316L,SUS+Hastelloy®
- F20 NL/min
- P114.8 MPa
- P20.99 MPa
High Purity High Performance High Pressure Regulator

L21 Series

High Pressure Regulator
RoHS Directive Products
- MSUS316L,SUS+Hastelloy®
- F20 NL/min
- P10.99 MPa 2 MPa 6 MPa
- P20.99 MPa
High Purity High Performance Point-of-Use Pressure Regulator

L26 Series

Point-of-Use Pressure Regulator
RoHS Directive Products
- MSUS316L,SUS+Hastelloy®
- F100 NL/min
- P16 MPa
- P20.9 MPa
High Purity High Performance Point-of-Use Pressure Regulator

L35 Series

Medium Flow Rate Applications
RoHS Directive Products
- MSUS316L,SUS+Hastelloy®
- F300 NL/min
- P114.8 MPa
- P20.8 MPa
High Purity High Performance High Pressure Regulator

L61 Series

High Flow Rate Applications
RoHS Directive Products
- MSUS316L,SUS+Hastelloy®
- F300 NL/min
- P114.8 MPa
- P20.8 MPa
High Purity High Performance High Pressure Regulator

L62 Series

High Flow Rate Applications (Needle Type)
RoHS Directive Products
- MSUS316L,SUS+Hastelloy®
- F25 NL/min
- P114.8 MPa
- P20.6 MPa
High Purity High Performance High Pressure Regulator

L81 Series

High Pressure Regulator
RoHS Directive Products
- MSUS316L
- F25 NL/min
- P114.8 MPa
- P20.99 MPa
High Purity High Performance High Pressure Regulator

L88 Series

High Pressure Regulator (Recommended for B2H6 , NF3 Service)
- MSUS316L,SUS+Hastelloy®
- F5 NL/min
- P10.99 MPa
- P2-0.1~0~0.2 MPa
High Purity High Performance Absolute Pressure Regulator

L96 Series

Absolute Pressure Regulator
RoHS Directive Products
- MSUS316L,SUS+Hastelloy®
- F500 NL/min
- P16 MPa
- P20.8 MPa
High Purity High Performance Point-of-Use Pressure Regulator

LH1 Series

High Flow Rate Applications
RoHS Directive Products
- MSUS316L,SUS+Hastelloy®
- F500 NL/min
- P16 MPa
- P20.8 MPa
High Purity High Performance Point-of-Use Pressure Regulator

LH2 Series

High Flow Rate Applications (Needle Type)
RoHS Directive Products
- MSUS316L
- F700 NL/min
- P12 MPa
- P20.8 MPa
High Purity High Performance Point-of-Use Pressure Regulator

LM1 Series

High Flow Rate Applications
RoHS Directive Products
- MSUS316L
- F700 NL/min
- P12 MPa
- P20.8 MPa
High Purity High Performance Point-of-Use Pressure Regulator

LM2 Series

High Flow Rate Applications (Needle Type)
RoHS Directive Products
- MSUS316L
- F700 NL/min
- P12 MPa
- P20.8 MPa
High Performance Point-of-Use Auto Pressure Regulator

LM2-D Series

Point-of-Use Auto Pressure Regulator
- MSUS316L
- F1000 NL/min
- P12 MPa
- P20.8 MPa
High Purity High Performance Point-of-Use Pressure Regulator

LL1 Series

High Flow Rate Applications
RoHS Directive Products
- MSUS316L
- F1500 NL/min
- P12 MPa
- P20.8 MPa
High Purity High Performance Point-of-Use Pressure Regulator

LL2 Series

High Flow Rate Applications
RoHS Directive Products
- MSUS316L,SUS+Hastelloy®
- F20 NL/min
- P10.99 MPa
- P20.6 MPa
High Purity High Performance Point-of-Use Pressure Regulator

L18 Series

Miniature Pressure Regulator Standard Flow Rate Applications
RoHS Directive Products
- MSUS316L,SUS+Hastelloy®
- F30 NL/min
- P10.99 MPa
- P20.7 MPa
High Purity High Performance Point-of-Use Pressure Regulator

L18H Series

Miniature Pressure Regulator Medium Flow Rate Applications
- MSUS316L,SUS+Hastelloy®
- F60 NL/min
- P114.8 MPa
- P21.2 MPa
High Performance High Pressure Regulator

R20 Series

High Pressure Regulator
- MSUS316L,SUS+Hastelloy®
- F20 NL/min
- P16 MPa
- P21.2 MPa
High Performance Point-of-Use Pressure Regulator

R25 Series

Point-of-Use Pressure Regulator
- MSUS316L,SUS+Hastelloy®
- F20 NL/min
- P12 MPa
- P20.99 MPa
High Performance Point-of-Use Pressure Regulator

R26 Series

Point-of-Use Pressure Regulator
RoHS Directive Products
- MSUS316L,SUS+Hastelloy®
- F100 NL/min
- P16 MPa
- P20.99 MPa
High Performance Point-of-Use Pressure Regulator

R35 Series

Medium Flow Applications
- MSUS316L,SUS316
- F100 NL/min
- P12 MPa
- P20.99 MPa
High Performance Point-of-Use Pressure Regulator

R36 Series

Medium Flow Rate Applications
- MSUS316L
- F300 NL/min
- P114.8 MPa
- P20.99 MPa
High Performance High Pressure Regulator

R61 Series

High Flow Rate Applications
New
- MSUS316L
- F25 NL/min
- P121 MPa
- P215 MPa
High Performance High Pressure Regulator

R72 Series

High Delivery Pressure Regulator
RoHS Directive Products
- MSUS316L,SUS+Hastelloy®
- F25 NL/min
- P114.8 MPa
- P20.6 MPa
High Performance Two-Stage Pressure Regulator

R81 Series

Minimizes Supply Pressure Effect
- MSUS316L,SUS+Hastelloy®
- F500 NL/min
- P16 MPa
- P20.99 MPa
High Performance Point-of-Use Pressure Regulator

RH1 Series

High Flow Rate Applications
- MSUS316L,SUS316
- F500 NL/min
- P12 MPa
- P20.99 MPa
High Performance Point-of-Use Pressure Regulator

RH2 Series

High Flow Rate Applications
- MSUS316L,SUS316
- F500 NL/min
- P12 MPa以下
- P20.99 MPa
High Performance Point-of-Use Pressure Regulator

RH2-D Series

High Flow Rate Applications
- MSUS316
- F6000 NL/min
- P12 MPa
- P20.8 MPa
High Performance Point-of-Use Dome Loaded Pressure Regulator

RLD Series

Dome Loaded Pressure Regulator Designed for Remote Operation in High Flow Rate Applications

Pressure regulator for Semiconductor manufacturing process

Pressure regulator for
Semiconductor manufacturing process